Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15673321
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Filing Dt:
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08/09/2017
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Publication #:
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Pub Dt:
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02/14/2019
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Inventors:
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Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey III, Alex Paterson et al
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Title:
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METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANCE SPECTRA MATCHING AND SURFACE KINETIC MODEL OPTIMIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612-0250 |
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