Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/25/2020
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Application #:
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16045979
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Filing Dt:
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07/26/2018
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Publication #:
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Pub Dt:
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02/21/2019
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Inventors:
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Fahong LI, Miguel GARCIA GRANDA, Carlo Cornelis Maria LUIJTEN, Bart Peter Bert SEGERS et al
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Title:
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Method of Calibrating Focus Measurements, Measurement Method and Metrology Apparatus, Lithographic System and Device Manufacturing Method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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