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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/05/2019
Application #:
16110417
Filing Dt:
08/23/2018
Publication #:
Pub Dt:
03/07/2019
Inventors:
Yusuke Kurita, Moritaka Iwakoshi, Taichi Yoshioka, Tohru Suzuki, Taizou Kawada et al
Title:
PATTERNING METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
047716/0045Recorded: 12/10/2018Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/10/2018
Exec Dt:
09/12/2018
Exec Dt:
09/12/2018
Exec Dt:
09/13/2018
Exec Dt:
09/12/2018
Exec Dt:
09/12/2018
Exec Dt:
11/08/2018
Exec Dt:
09/12/2018
Assignee:
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU
TOKYO, JAPAN 146-8501
Correspondent:
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU
TOKYO, 146-8501 JAPAN

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