Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15903103
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Filing Dt:
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02/23/2018
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Publication #:
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Pub Dt:
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03/14/2019
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Inventors:
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Xiaowei Wu, David Fenwick, Jennifer Y. Sun
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Title:
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FLUORINATED RARE EARTH OXIDE ALD COATING FOR CHAMBER PRODUCTIVITY ENHANCEMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATENT DOCKET ADMINISTRATOR |
| LOWENSTEIN SANDLER LLP |
| ONE LOWENSTEIN DRIVE |
| ROSELAND, NJ 07068 |
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