Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/22/2020
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Application #:
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16108529
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Filing Dt:
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08/22/2018
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Publication #:
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Pub Dt:
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03/21/2019
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Inventors:
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Wen Dar Liu, Yi-Chia Lee
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Title:
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Etching Solution For Selectively Removing Tantalum Nitride Over Titanium Nitride During Manufacture of a Semiconductor Device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8555 SOUTH RIVER PARKWAY |
| PATENT DEPT. |
| TEMPE, ARIZONA 85284 |
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| LISA HOFFMANN |
| 7350 TILGHMAN STREET, SUITE 104 |
| PATENT DEPT. |
| ALLENTOWN, PA 18106-9000 |
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