Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/12/2020
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Application #:
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16134622
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Filing Dt:
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02/15/2021
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Publication #:
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Pub Dt:
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03/28/2019
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Inventors:
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Kimihiko NAKATANI, Atsushi SANO, Kenji KAMEDA, Tatsuru MATSUOKA
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE AND KOENIG, P.C. |
| 30 S. 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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