Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16149792
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Filing Dt:
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10/02/2018
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Publication #:
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Pub Dt:
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04/04/2019
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Inventors:
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Oleg Byl, Joseph D. Sweeney, Ying Tang, Sharad N. Yedave, Barry Lewis Chambers
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Title:
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PHOSPHORUS OR ARSENIC ION IMPLANTATION UTILIZING ENHANCED SOURCE TECHNIQUES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129 CONCORD ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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| ENTEGRIS, INC. |
| 129 CONCORD ROAD |
| BILLERICA, MA 01821 |
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