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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10643825
Issue Dt:
05/05/2020
Application #:
16151475
Filing Dt:
10/04/2018
Publication #:
20190108987
Pub Dt:
04/11/2019
Inventors:
Takashi TETSUKA, Hiroshi NAGAIKE, Masatomo KITA, Chihiro SATO, Naoya SUENAGA
Title:
PARTICLE GENERATION PREVENTING METHOD AND VACUUM APPARATUS
Assignment: 1
Reel/Frame:
047231/0932Recorded: 10/19/2018Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TETSUKA, TAKASHI
Exec Dt:
10/02/2018
NAGAIKE, HIROSHI
Exec Dt:
10/02/2018
KITA, MASATOMO
Exec Dt:
10/02/2018
SATO, CHIHIRO
Exec Dt:
10/02/2018
SUENAGA, NAOYA
Exec Dt:
10/02/2018
Assignee:
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondent:
IPUSA, P.L.L.C
1054 31ST STREET, N.W.
SUITE 400
WASHINGTON, DC 20007

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