Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/10/2019
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Application #:
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15821661
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Filing Dt:
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11/22/2017
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Publication #:
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Pub Dt:
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05/23/2019
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Inventors:
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Kenny Linh DOAN, Wonseok Lee, Li Ling, Daisuke Shimizu, Usama Dadu, Kevin Choi
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Title:
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USING BIAS RF PULSING TO EFFECTIVELY CLEAN ELECTROSTATIC CHUCK (ESC)
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| JUSTIN K. BRASK |
| 1211 SW FIFTH AVENUE |
| SUITE 1900 |
| PORTLAND, OR 97204 |
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