Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/04/2020
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Application #:
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15820108
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Filing Dt:
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11/21/2017
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Publication #:
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Pub Dt:
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05/23/2019
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Inventors:
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Xiang Zhou, Yoshie Kimura, Chen Xu, Mitchell Brooks, Duming Zhang, Ganesh Upadhyaya
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Title:
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ATOMIC LAYER DEPOSITION AND ETCH IN A SINGLE PLASMA CHAMBER FOR CRITICAL DIMENSION CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612 |
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