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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10649340
Issue Dt:
05/12/2020
Application #:
16257811
Filing Dt:
01/25/2019
Publication #:
20190171108
Pub Dt:
06/06/2019
Inventors:
Vitaliy SHKLOVER, Stefan-Wolfgang SCHMIDT, Stefan WIESNER, Robert MEIER et al
Title:
REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY
Assignment: 1
Reel/Frame:
048782/0964Recorded: 04/03/2019Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
EHM, DIRK HEINRICH
Exec Dt:
02/11/2019
SHKLOVER, VITALIY
Exec Dt:
01/04/2019
AMENT, IRENE
Exec Dt:
02/22/2019
SCHMIDT, STEFAN-WOLFGANG
Exec Dt:
02/21/2019
BECKER, MORTIZ
Exec Dt:
02/25/2019
WIESNER, STEFAN
Exec Dt:
02/11/2019
URICH, DIANA
Exec Dt:
02/11/2019
MEIER, ROBERT
Exec Dt:
02/05/2019
WINTER, RALF
Exec Dt:
02/22/2019
JALICS, CHRISTOF
Exec Dt:
02/28/2019
KIEREY, HOLGER
Exec Dt:
02/13/2019
EVA, ERIC
Exec Dt:
03/22/2019
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
EDELL, SHAPIRO & FINNAN, LLC
GEORGE F. LEHNIGK
9801 WASHINGTONIAN BLVD., SUITE 750
GAITHERSBURG, MD 20878

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