Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/01/2020
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Application #:
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16217978
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Filing Dt:
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12/12/2018
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Publication #:
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Pub Dt:
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06/13/2019
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Inventors:
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Tsutomu Tanaka, Dmitry A. Dzilno, Alexander V. Garachtchenko, Keiichi Tanaka
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Title:
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SPATIAL ATOMIC LAYER DEPOSITION CHAMBER WITH PLASMA PULSING TO PREVENT CHARGE DAMAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| SERVILLA WHITNEY LLC |
| 33 WOOD AVENUE SOUTH, SUITE 830 |
| ISELIN, NJ 08830 |
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