Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/15/2021
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Application #:
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16296880
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Filing Dt:
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03/08/2019
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Publication #:
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Pub Dt:
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07/04/2019
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Inventors:
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Mamoru OISHI, Yasuhiro MATSUDA, Masaya NISHIDA
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Title:
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SUBSTRATE PROCESSING APPARATUS, VIBRATION DETECTION SYSTEM AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO, |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE AND KOENIG, P.C. |
| 30 S. 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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