Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16338931
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Filing Dt:
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04/02/2019
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Publication #:
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Pub Dt:
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08/08/2019
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Inventors:
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Koichi TAKEDA, Tsuneo TORIKOSHI, Kunio OISHI, Katsuhide WATANABE, Hozumi YASUDA, Yu ISHII
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Title:
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SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL METHOD, AND PROGRAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OTA-KU |
| TOKYO, JAPAN 144-8510 |
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| LEYDIG, VOIT & MAYER, LTD |
| TWO PRUDENTIAL PLAZA, SUITE 4900 |
| 180 NORTH STETSON AVENUE |
| CHICAGO, IL 60601-6731 |
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