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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
16280874
Filing Dt:
02/20/2019
Publication #:
Pub Dt:
08/22/2019
Inventors:
Koei KURIBAYASHI, Kenji KAMEDA, Tsukasa KAMAKURA, Takeo HANASHIMA, Hiroaki HIRAMATSU et al
Title:
METHOD OF CLEANING MEMBER IN PROCESS CONTAINER, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
Assignment: 1
Reel/Frame:
048446/0085Recorded: 02/26/2019Pages: 15
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/04/2019
Exec Dt:
02/04/2019
Exec Dt:
02/04/2019
Exec Dt:
02/04/2019
Exec Dt:
02/04/2019
Exec Dt:
02/04/2019
Exec Dt:
02/11/2019
Exec Dt:
02/04/2019
Exec Dt:
02/04/2019
Exec Dt:
02/04/2019
Exec Dt:
02/04/2019
Assignee:
3-4, KANDAKAJI-CHO,
CHIYODA-KU
TOKYO, JAPAN 101-0045
Correspondent:
VOLPE AND KOENIG, P.C.
30 S. 17TH STREET
SUITE 1800
PHILADELPHIA, PA 19103

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