Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/12/2021
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Application #:
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16291485
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Filing Dt:
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03/04/2019
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Publication #:
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Pub Dt:
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09/05/2019
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Inventors:
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Mitsuhiro Okada, Tatsuya Miyahara, Keisuke Fujita
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Title:
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SILICON FILM FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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NATH, GOLDBERG & MEYER |
112 S. WEST ST. |
36427U_JLM/ALS |
ALEXANDRIA, VA 22314 |
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