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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
11101136
Issue Dt:
08/24/2021
Application #:
16416865
Filing Dt:
05/20/2019
Publication #:
20190272998
Pub Dt:
09/05/2019
Inventors:
Tien Fak Tan, Lala Zhu, Dmitry Lubomirsky, Ming Xia, Dongqing Yang, Peter Hillman et al
Title:
PROCESS WINDOW WIDENING USING COATED PARTS IN PLASMA ETCH PROCESSES
Assignment: 1
Reel/Frame:
049231/0414Recorded: 05/20/2019Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
YANG, DONGQING
Exec Dt:
02/26/2019
TAN, TIEN FAK
Exec Dt:
02/20/2019
HILLMAN, PETER
Exec Dt:
04/09/2019
ZHU, LALA
Exec Dt:
04/01/2019
INGLE, NITIN K.
Exec Dt:
02/05/2019
LUBOMIRSKY, DMITRY
Exec Dt:
04/08/2019
SNEDIGAR, CHRISTOPHER
Exec Dt:
02/08/2019
XIA, MING
Exec Dt:
02/06/2019
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
KILPATRICK TOWNSEND & STOCKTON LLP
1100 PEACHTREE ST NE #2800
ATLANTA, GA 30309

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