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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/18/2021
Application #:
16422477
Filing Dt:
05/24/2019
Publication #:
Pub Dt:
09/19/2019
Inventors:
Han-Wen CHEN, Steven VERHAVERBEKE, Roman GOUK
Title:
STICTION-FREE DRYING PROCESS WITH CONTAMINANT REMOVAL FOR HIGH-ASPECT RATIO SEMICONDUCTOR DEVICE STRUCTURES
Assignment: 1
Reel/Frame:
050170/0154Recorded: 08/26/2019Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/14/2013
Exec Dt:
11/15/2013
Exec Dt:
11/20/2013
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
PATTERSON + SHERIDAN, LLP
24 GREENWAY PLAZA
SUITE 1600
HOUSTON, TX 77046

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