Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16521206
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Filing Dt:
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07/24/2019
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Publication #:
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Pub Dt:
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11/14/2019
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Inventors:
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WONSEOK LEE, KARTIK RAMASWAMY, Ankur AGARWAL, Haitao WANG
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Title:
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METHOD AND APPARATUS FOR ION ENERGY DISTRIBUTION MANIPULATION FOR PLASMA PROCESSING CHAMBERS THAT ALLOWS ION ENERGY BOOSTING THROUGH AMPLITUDE MODULATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| MOSER TABOADA/ALAN TABOADA |
| 1030 BROAD STREET |
| SUITE 203 |
| SHREWSBURY, NJ 07702 |
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