Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/19/2023
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Application #:
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16531940
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Filing Dt:
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08/05/2019
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Publication #:
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Pub Dt:
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11/21/2019
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Inventors:
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Pradeep Vukkadala, Haiguang Chen, Jaydeep K. Sinha, Sathish Veeraraghavan
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Title:
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Process-Induced Distortion Prediction and Feedforward and Feedback Correction of Overlay Errors
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
| 14301 FNB PARKWAY |
| SUITE 220 |
| OMAHA, NE 68154-5299 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
| SUITER SWANTZ PC LLO |
| 14301 FNB PARKWAY, SUITE 220 |
| OMAHA, NE 68154 |
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