Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/30/2021
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Application #:
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16413068
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Filing Dt:
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05/15/2019
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Publication #:
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Pub Dt:
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11/21/2019
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Inventors:
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Yasuo ASADA, Ayano HAGIWARA, Kenji TANOUCHI, Takehiko ORII, Jun LIN, Shinji IRIE et al
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Title:
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METHOD OF ETCHING SILICON-CONTAINING FILM, COMPUTER-READABLE STORAGE MEDIUM, AND APPARATUS FOR ETCHING SILICON-CONTAINING FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| NATH, GOLDBERG & MEYER |
| 112 S. WEST ST. |
| 36559U_JLM/ALS |
| ALEXANDRIA, VA 22314 |
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