Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/25/2021
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Application #:
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16563466
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Filing Dt:
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09/06/2019
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Publication #:
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Pub Dt:
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12/26/2019
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Inventors:
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Yukitomo HIROCHI, Kazuhiro YUASA, Tetsuo YAMAMOTO, Yoshihiko YANAGISAWA, Shinya SASAKI et al
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE AND KOENIG, P.C. |
| 30 SOUTH 17TH STREET, 18TH FLOOR |
| PHILADELPHIA, PA 19103 |
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