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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/04/2022
Application #:
16522890
Filing Dt:
07/26/2019
Publication #:
Pub Dt:
01/30/2020
Inventors:
Michiko NAKAYA, Toru HISAMATSU, Shinya ISHIKAWA, Sho KUMAKURA, Masanobu HONDA et al
Title:
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
050656/0149Recorded: 10/08/2019Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/24/2019
Exec Dt:
07/29/2019
Exec Dt:
07/29/2019
Exec Dt:
07/22/2019
Exec Dt:
07/22/2019
Exec Dt:
07/22/2019
Assignee:
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
ROTHWELL FIGG ERNST & MANBECK P.C.
607 14TH STREET, N.W.
SUITE 800
WASHINGTON, DC 20005

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