Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/26/2020
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Application #:
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16593294
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Filing Dt:
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10/04/2019
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Publication #:
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Pub Dt:
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01/30/2020
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Inventors:
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Yuta TAKASHIMA, Yoshifumi UENO
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Title:
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TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND TARGET SUPPLY METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 400, OAZA YOKOKURASHINDEN, OYAMA-SHI |
| TOCHIGI, JAPAN 323-8558 |
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| STUDEBAKER & BRACKETT PC |
| 8255 GREENSBORO DRIVE |
| SUITE 300 |
| TYSONS, VA 22102 |
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