Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/22/2023
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Application #:
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16535325
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Filing Dt:
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08/08/2019
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Publication #:
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Pub Dt:
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02/13/2020
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Inventors:
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Ichiju Satoh, Toshimitsu Barada
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Title:
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SUBSTRATE ROTATION DEVICE, SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND CONTROL METHOD FOR SUBSTRATE ROTATION DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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11-1, HANEDA ASAHI-CHO, OTA-KU |
TOKYO 144-8510, JAPAN |
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ABELMAN, FRAYNE & SCHWAB/LEE |
666 THIRD AVENUE |
10TH FLOOR |
NEW YORK, NY 10017-5621 |
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