Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/23/2021
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Application #:
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16285548
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Filing Dt:
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02/26/2019
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Publication #:
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Pub Dt:
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02/27/2020
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Inventors:
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MYUNG-JUN LEE, Ken Ozawa, Wook-rae Kim, Gwang-Sik Park, Ji-hoon Kang, Kwang-Soo Kim
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Title:
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STRUCTURED ILLUMINATION-BASED INSPECTION APPARATUS AND INSPECTION METHOD, AND SEMICONDUCTOR DEVICE FABRICATION METHOD INCLUDING STRUCTURED ILLUMINATION-BASED INSPECTION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129, SAMSUNG-RO, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677 |
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| F. CHAU & ASSOCIATES, LLC |
| 130 WOODBURY ROAD |
| WOODBURY, NY 11797 |
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