Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/21/2020
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Application #:
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16491274
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Filing Dt:
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09/05/2019
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Publication #:
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Pub Dt:
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03/05/2020
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Inventors:
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Naoyuki WADA, Keiko MATSUO, Masahiko EGASHIRA
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Title:
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METHOD OF INSPECTING BACK SURFACE OF EPITAXIAL WAFER, EPITAXIAL WAFER BACK SURFACE INSPECTION APPARATUS, METHOD OF MANAGING LIFT PIN OF EPITAXIAL GROWTH APPARATUS, AND METHOD OF PRODUCING EPITAXIAL WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 1058634 |
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| GREENBLUM & BERNSTEIN, P.L.C. |
| 1950 ROLAND CLARKE PLACE |
| RESTON, VA 20191 |
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