Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/03/2021
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Application #:
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16548429
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Filing Dt:
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08/22/2019
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Publication #:
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Pub Dt:
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03/12/2020
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Inventors:
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Ichiro Yoshimura, Alex Chu, H.J. Chiu, Sumeet Bhagavat, TaeHyeong Kim, Norimasa Katakura et al
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Title:
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METHODS FOR POLISHING SEMICONDUCTOR SUBSTRATES THAT ADJUST FOR PAD-TO-PAD VARIANCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8 INDUSTRIAL EAST ROAD 2 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN |
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| ARMSTRONG TEASDALE LLP |
| 7700 FORSYTH BOULEVARD |
| SUITE 1800 |
| ST. LOUIS, MO 63105 |
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