Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/18/2020
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Application #:
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16568044
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Filing Dt:
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09/11/2019
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Publication #:
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Pub Dt:
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04/02/2020
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Inventors:
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Yu-Chih HUANG, Chi YANG, Che-Chang HSU, Li-Jui CHEN, Po-Chung CHENG
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Title:
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APPARATUS AND METHOD FOR MONITORING REFLECTIVITY OF THE COLLECTOR FOR EXTREME ULTRAVIOLET RADIATION SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITAL STREET, N.W. |
| WASHINGTON, DC 20001 |
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