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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10624196
Issue Dt:
04/14/2020
Application #:
16242093
Filing Dt:
01/08/2019
Publication #:
20200107428
Pub Dt:
04/02/2020
Inventors:
Henry Yee-Shian TONG, Wen-Chih WANG, Hsin-Liang CHEN, Louis Chun-Lin CHANG et al
Title:
LASER SOURCE DEVICE AND EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE
Assignment: 1
Reel/Frame:
047926/0468Recorded: 01/08/2019Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TONG, HENRY YEE-SHIAN
Exec Dt:
11/13/2018
WANG, WEN-CHIH
Exec Dt:
11/14/2018
CHEN, HSIN-LIANG
Exec Dt:
11/14/2018
CHANG, LOUIS CHUN-LIN
Exec Dt:
11/13/2018
CHEN, CHENG-CHIEH
Exec Dt:
11/14/2018
CHEN, LI-JUI
Exec Dt:
11/20/2018
CHENG, PO-CHUNG
Exec Dt:
12/28/2018
TSAY, JENG-YANN
Exec Dt:
11/19/2018
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6
SCIENCE-BASED INDUSTRIAL PARK
HSINCHU, TAIWAN 300
Correspondent:
MCCLURE, QUALEY & RODACK, LLP
280 INTERSTATE NORTH CIRCLE SE
SUITE 550
ATLANTA, GA 30339

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