Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/04/2020
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Application #:
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16705437
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Filing Dt:
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12/06/2019
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Publication #:
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Pub Dt:
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04/09/2020
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Inventors:
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Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li
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Title:
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TECHNIQUES FOR DETECTING MICRO-ARCING OCCURRING INSIDE A SEMICONDUCTOR PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6 |
| HSIN-CHU SCIENCE PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| ESCHWEILER & POTASHNIK, LLC |
| ROSETTA CENTER |
| 629 EUCLID AVE., SUITE 1000 |
| CLEVELAND, OH 44114 |
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