Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/15/2021
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Application #:
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16724944
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Filing Dt:
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12/23/2019
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Publication #:
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Pub Dt:
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04/23/2020
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Inventors:
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Kevin Anglin, William Davis Lee, Peter Kurunczi, Ryan Downey, Jay T. Scheuer et al
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Title:
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IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| KACVINSKY DAISAK BLUNI PLLC |
| 2601 WESTON PARKWAY, SUITE 103 |
| CARY, NC 27513 |
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