Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16176245
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Filing Dt:
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10/31/2018
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Publication #:
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Pub Dt:
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04/30/2020
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Inventors:
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Suwoong Kim, Myung Yeol Kim, Jae Hwan Sim, Jin Hong Park, Yoo-Jin Ghang, Jae-Bong Lim
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Title:
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COATING COMPOSITION FOR FORMING RESIST UNDERLAYER FILM FOR EUV LITHOGRAPHY PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 56, 3GONGDAN 1-RO, SEOBUK-GU |
| CHUNGCHEONGNAM-DO |
| CHEONAN-SI, KOREA, REPUBLIC OF 31093 |
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| CANTOR COLBURN LLP |
| 20 CHURCH ST |
| 22ND FLOOR |
| HARTFORD, CT 06103 |
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