Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/01/2022
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Application #:
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16186320
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Filing Dt:
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11/09/2018
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Publication #:
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Pub Dt:
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05/14/2020
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Inventors:
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Ilya Bezel, Andrey Stepanov, Matthew Derstine, Nikolay Sherbak
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Title:
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System and Method for Pumping Laser Sustained Plasma with an Illumination Source Having Modified Pupil Power Distribution
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Assignment:
1
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
| 14301 FNB PARKWAY, SUITE 220 |
| OMAHA, NE 68154 |
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