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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/03/2021
Application #:
16728026
Filing Dt:
12/27/2019
Publication #:
Pub Dt:
05/14/2020
Inventors:
Tzu-Ting Chou, Chung-Hsuan Liu, Kuan-Wen Lin, Chi-Lun Lu, Ting-Hao Hsu, Sheng-Chi Chin
Title:
System and Method for Localized EUV Pellicle Glue Removal
Assignment: 1
Reel/Frame:
053049/0536Recorded: 06/26/2020Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/26/2016
Exec Dt:
07/26/2016
Exec Dt:
07/26/2016
Exec Dt:
07/29/2016
Exec Dt:
07/27/2016
Exec Dt:
07/16/2016
Assignee:
NO. 8, LI-HSIN RD. 6
SCIENCE-BASED INDUSTRIAL PARK
HSINCHU, TAIWAN 300-77
Correspondent:
HAYNES AND BOONE, LLP (24061) IP SECTION
2323 VICTORY AVENUE
SUITE 700
DALLAS, TX 75219

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