Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/13/2021
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Application #:
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16729189
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Filing Dt:
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12/27/2019
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Publication #:
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Pub Dt:
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07/16/2020
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Inventors:
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Jiajun XU, Zhixiang LIU, Tingwen XING, Wumei LIN
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Title:
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APPARATUS AND METHOD FOR DETECTING OPTIMAL FOCAL PLANE OF LITHOGRAPHIC PROJECTION OBJECTIVE LENS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 350 |
| SHUANGLIU, CHENGDU, SICHUAN, CHINA 610209 |
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| DAVIS WRIGHT TREMAINE LLP |
| 920 FIFTH AVENUE |
| SUITE 3300 |
| SEATTLE, WA 98104-1610 |
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