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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/10/2022
Application #:
16737083
Filing Dt:
01/08/2020
Publication #:
Pub Dt:
07/30/2020
Inventors:
Xiaobo Shi, Krishna P. Murella, Joseph D. Rose, Hongjun Zhou, Mark Leonard O'Neill
Title:
Shallow Trench Isolation (STI) Chemical Mechanical Planarization (CMP) Polishing With Low Abrasive Concentration And A Combination Of Chemical Additives
Assignment: 1
Reel/Frame:
052077/0780Recorded: 03/11/2020Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/25/2020
Exec Dt:
02/25/2020
Exec Dt:
02/25/2020
Exec Dt:
02/25/2020
Exec Dt:
02/25/2020
Assignee:
8555 SOUTH RIVER PARKWAY
PATENT DEPT.
TEMPE, ARIZONA 85284
Correspondent:
LISA HOFFMANN
7350 TILGHMAN STREET, SUITE 104
PATENT DEPT.
ALLENTOWN, PA 18106-9000

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