Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/11/2021
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Application #:
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16746118
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Filing Dt:
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01/17/2020
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Publication #:
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Pub Dt:
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07/30/2020
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Inventors:
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Masato HAYASHI, Kohei NOGUCHI, Koudai HIGASHI, Makoto OGATA
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| NATH, GOLDBERG & MEYER |
| 112 S. WEST STREET |
| 37158U-DD |
| ALEXANDRIA, VA 22314 |
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