Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/06/2021
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Application #:
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16871863
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Filing Dt:
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05/11/2020
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Publication #:
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Pub Dt:
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08/27/2020
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Inventors:
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Hiroshi YAKUSHIJI, Yuto WATANABE, Masahiro SHIBAMOTO
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1, KURIGI, ASAO-KU |
| KAWASAKI-SHI, KANAGAWA-KEN, JAPAN 215-8550 |
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| BUCHANAN INGERSOLL & ROONEY PC |
| P.O. BOX 1404 |
| ALEXANDRIA, VA 22314-1404 |
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