Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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11/22/2022
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Application #:
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16647560
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Filing Dt:
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03/16/2020
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Publication #:
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Pub Dt:
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09/03/2020
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Inventors:
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Kenta KONDO, Toshihide YOSHIDA, Kenji AIKAWA, Hidenobu SATO, Tomohiro NAKATA et al
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Title:
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VALVE APPARATUS, FLOW RATE ADJUSTING METHOD, FLUID CONTROL APPARATUS, FLOW RATE CONTROL METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-2, ITACHIBORI 2-CHOME, NISHI-KU, OSAKA-CITY |
| OSAKA, JAPAN 550-0012 |
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| GREENBLUM & BERNSTEIN, P.L.C. |
| 1950 ROLAND CLARKE PLACE |
| RESTON, VA 20191 |
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