Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/10/2021
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Application #:
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16887245
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Filing Dt:
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05/29/2020
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Publication #:
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Pub Dt:
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09/17/2020
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Inventors:
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Wei-Shin CHENG, Hsin-Feng CHEN, Shao-Hua WANG, Li-Jui CHEN, Cheng-Hao LAI, Han-Lung CHANG et al
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Title:
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LITHOGRAPHY SYSTEM AND METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| 8110 GATEHOUSE RD. |
| SUITE 100 EAST |
| FALLS CHURCH, VA 22042 |
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