Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/12/2021
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Application #:
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16361076
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Filing Dt:
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03/21/2019
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Publication #:
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Pub Dt:
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09/24/2020
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Inventors:
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Robert L. Sandstrom, Peter H. Bartlau, Thomas B. Faure, Supratik Guha, Edward W. Kiewra et al
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Title:
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PROTECTION OF PHOTOMASKS FROM 193nm RADIATION DAMAGE USING THIN COATINGS OF ALD Al2O3.
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD STREET |
| ARMONK, NEW YORK 10504 |
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| THOMAS A. BECK |
| 6136 WEST KIMBERLY WAY |
| GLENDALE, AZ 85308-7627 |
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