Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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06/29/2021
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Application #:
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16642133
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Filing Dt:
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02/26/2020
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Publication #:
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Pub Dt:
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09/24/2020
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Inventors:
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Qi Hua FAN, Thomas SCHUELKE, Michael PETZOLD, Lars HAUBOLD
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Title:
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SINGLE BEAM PLASMA SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 450 ADMINISTRATION BUILDING |
| EAST LANSING, MICHIGAN 48824 |
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| HARNESS, DICKEY & PIERCE, PLC |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1449 ENGINEERING RESEARCH CT. |
| EAST LANSING, MICHIGAN 48824 |
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| HARNESS, DICKEY & PIERCE, PLC |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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Assignment:
3
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 2415 EISENHOWER AVENUE |
| ROOM W 18000 |
| ALEXANDRIA, VIRGINIA 22314 |
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| NATIONAL SCIENCE FOUNDATION |
| 2415 EISENHOWER AVENUE |
| ROOM W 18000 |
| ALEXANDRIA, VA 22314 |
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Assignment:
4
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 2415 EISENHOWER AVENUE |
| ROOM W 18000 |
| ALEXANDRIA, VIRGINIA 22314 |
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| NATIONAL SCIENCE FOUNDATION |
| 2415 EISENHOWER AVENUE |
| ROOM W 18000 |
| ALEXANDRIA, VA 22314 |
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