Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/01/2022
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Application #:
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16813855
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Filing Dt:
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03/10/2020
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Publication #:
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Pub Dt:
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09/24/2020
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Inventors:
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Takaharu MIYADATE, Takashi Taira, Kenji Nagai, Hideaki Nagasaki
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Title:
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APPARATUS FOR PROCESSING SUBSTRATE AND METHOD FOR DETECTING A PRESENCE OF A FOCUS RING ON A STAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| XSENSUS LLP |
| 200 DAINGERFIELD ROAD |
| SUITE 201 |
| ALEXANDRIA, VA 22314 |
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