Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/04/2022
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Application #:
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16957347
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Filing Dt:
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06/23/2020
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Publication #:
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Pub Dt:
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10/22/2020
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Inventors:
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Miyako Matsui, Kenichi Kuwahara, Tatehito Usui, Hiroyuki Kobayashi
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Title:
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PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17-1, TORANOMON 1-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| MILES & STOCKBRIDGE, P.C. |
| 1751 PINNACLE DRIVE |
| SUITE 1500 |
| TYSONS CORNER, VA 22102-3833 |
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