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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/13/2021
Application #:
16989328
Filing Dt:
08/10/2020
Publication #:
Pub Dt:
11/26/2020
Inventor:
Yoshiyuki HONDA
Title:
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
053447/0050Recorded: 08/10/2020Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
06/01/2020
Assignee:
400, OAZA YOKOKURASHINDEN, OYAMA-SHI
TOCHIGI, JAPAN 323-8558
Correspondent:
STUDEBAKER & BRACKETT PC
8255 GREENSBORO DRIVE
SUITE 300
TYSONS, VA 22102

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