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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
11473978
Issue Dt:
10/18/2022
Application #:
16560566
Filing Dt:
09/04/2019
Publication #:
20200378837
Pub Dt:
12/03/2020
Inventors:
Dawei Sun, Qin Chen, Lyudmila Stone, Ron Serisky, D. Jeffrey Lischer, Dale K. Stone et al
Title:
ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND METHOD
Assignment: 1
Reel/Frame:
052743/0189Recorded: 05/25/2020Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SUN, DAWEI
Exec Dt:
09/13/2019
LISCHER, D. JEFFREY
Exec Dt:
09/10/2019
CHEN, QIN
Exec Dt:
12/17/2019
STONE, DALE K.
Exec Dt:
10/04/2019
STONE, LYUDMILA
Exec Dt:
10/01/2019
ANELLA, STEVEN
Exec Dt:
12/19/2019
SERISKY, RON
Exec Dt:
12/17/2019
CHENG, CHI-YANG
Exec Dt:
09/09/2019
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
KACVINSKY DAISAK BLUNI PLLC
2601 WESTON PARKWAY, SUITE 103
CARY, NC 27513

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