Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16864972
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Filing Dt:
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05/01/2020
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Publication #:
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Pub Dt:
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12/03/2020
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Inventors:
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Dmitriy Zusin, Rui-fang Shi, Qiang Q. Zhang
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Title:
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Wave-Front Aberration Metrology of Extreme Ultraviolet Mask Inspection Systems
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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MATTHEW POULSEN, PHD. |
SUITER SWANTZ INTELLECTUAL PROPERTY |
14301 FNB PARKWAY, SUITE 220 |
OMAHA, NE 68154 |
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05/29/2024 03:41 PM
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