Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/21/2021
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Application #:
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16995759
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Filing Dt:
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08/17/2020
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Publication #:
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Pub Dt:
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12/03/2020
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Inventors:
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Chi YANG, Li-Jui CHEN, Yu-Chih HUANG, Che-Chang HSU, Po-Chung CHENG
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Title:
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APPARATUS AND METHOD FOR MONITORING REFLECTIVITY OF THE COLLECTOR FOR EXTREME ULTRAVIOLET RADIATION SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITAL STREET, N.W. |
| WASHINGTON, DC 20001 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE TYPOGRAPHICAL ERROR IN INVENTOR CHENG'S NAME PREVIOUSLY RECORDED ON REEL 053517 FRAME 0520. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
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| NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITOL STREET NW |
| WASHINGTON, DC 20001 |
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