Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/18/2023
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Application #:
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16892945
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Filing Dt:
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06/04/2020
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Publication #:
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Pub Dt:
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12/10/2020
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Inventor:
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Katsuyuki KOIZUMI
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Title:
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THERMAL REGULATOR, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF CONTROLLING TEMPERATURE OF STAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, |
TOKYO, JAPAN 107-6325 |
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NATH GOLDBERG AND MEYER |
112 S WEST ST |
ALEXANDRIA, VA 22314 |
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05/09/2024 10:56 PM
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